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Integrated visual nanometric three dimensional positioning and inspection in the automated assembly of AFM probe arrays

Lanzetta, Michele and Culpepper, Martin L. (2010) Integrated visual nanometric three dimensional positioning and inspection in the automated assembly of AFM probe arrays. CIRP Annals - Manufacturing Technology, 59 (1). ISSN 0007-8506

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    Abstract

    SUMMARY This paper presents the design of a monocular three dimensional artificial vision system attached to a 20x microscope lens for precision and microsystems applications. Possible uses in assembly include: positioner calibration, sensor-based part handling, positioning, and inspection in the nanometric range. The developed image acquisition method – along one direction (in steps of 100 nm), the depth-from-focus algorithm and subpixel interpolation (of 5 acquisitions for concurrent localization and inspection), allow to overcome the physical optics limitation achieving a resolution under 200 nm. The vision strategy and algorithms, described in the paper, have been validated by handling an AFM probe array by a micropositioner.

    Item Type: Article
    Additional Information: First author's home page http://www.ing.unipi.it/lanzetta More papers from the same author http://arp.unipi.it/listedoc.php?lista=ALL&ide=9155&ord=C
    Uncontrolled Keywords: Assembly, Visual Inspection, Localization
    Subjects: Area09 - Ingegneria industriale e dell'informazione > ING-IND/16 - Tecnologie e sistemi di lavorazione
    Divisions: Dipartimenti (until 2012) > DIPARTIMENTO DI INGEGNERIA MECCANICA, NUCLEARE E DELLA PRODUZIONE
    Depositing User: Prof. Ing. Michele Lanzetta
    Date Deposited: 18 Mar 2010
    Last Modified: 20 Dec 2010 11:38
    URI: http://eprints.adm.unipi.it/id/eprint/693

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