Lanzetta, Michele and Culpepper, Martin L. (2010) Integrated visual nanometric three dimensional positioning and inspection in the automated assembly of AFM probe arrays. CIRP Annals - Manufacturing Technology, 59 (1). ISSN 0007-8506
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Abstract
SUMMARY This paper presents the design of a monocular three dimensional artificial vision system attached to a 20x microscope lens for precision and microsystems applications. Possible uses in assembly include: positioner calibration, sensor-based part handling, positioning, and inspection in the nanometric range. The developed image acquisition method – along one direction (in steps of 100 nm), the depth-from-focus algorithm and subpixel interpolation (of 5 acquisitions for concurrent localization and inspection), allow to overcome the physical optics limitation achieving a resolution under 200 nm. The vision strategy and algorithms, described in the paper, have been validated by handling an AFM probe array by a micropositioner.
Item Type: | Article |
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Additional Information: | First author's home page http://www.ing.unipi.it/lanzetta More papers from the same author http://arp.unipi.it/listedoc.php?lista=ALL&ide=9155&ord=C |
Uncontrolled Keywords: | Assembly, Visual Inspection, Localization |
Subjects: | Area09 - Ingegneria industriale e dell'informazione > ING-IND/16 - Tecnologie e sistemi di lavorazione |
Divisions: | Dipartimenti (until 2012) > DIPARTIMENTO DI INGEGNERIA MECCANICA, NUCLEARE E DELLA PRODUZIONE |
Depositing User: | Prof. Ing. Michele Lanzetta |
Date Deposited: | 18 Mar 2010 |
Last Modified: | 20 Dec 2010 11:38 |
URI: | http://eprints.adm.unipi.it/id/eprint/693 |
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